|
03-08 |
"Numerical Study on Charged Particle Characteristics Around…
 |
Ahn, Kang-Ho |
AAAR '97, 16th Annual Conference |
613 |
|
03-08 |
Particle Deposition Velocities on a Rotating Wafer,
|
Ahn, Kang-Ho |
ICCCS 13th International Symposium on Contamination Control |
579 |
|
03-08 |
“Removal of Hydrocarbon Contaminants on a Silicon Surface u…
|
K.W. Lee |
ICCCS 12th International Symposium on Contamination Control, |
550 |
|
03-08 |
In-Line Vacuum Tunnel-integrated System to Study Wafer Clea…
|
K.W. Lee |
Proceedings of the 2nd Workshop on Semiconductor Wafer Cleaning and Surface Characterization, Eds. K. Ryoo and S. Kang, Research Institute of Industrial Science and Technology |
562 |
|
03-08 |
“Contamination Control of Semiconductor Fabrication Equipmen…
|
Ahn, Kang-Ho |
Proceedings of the 2nd Workshop on Semiconductor Wafer Cleaning and Surface Characterization, Eds. K. Ryoo and S. Kang, Research Institute of Industrial Science and Technology |
549 |
|
03-08 |
"Gas Flow Patterns and Thermal Uniformity in Rapid Thermal …
|
S. A. Campbell |
Int. Electron Devices Meeting, |
599 |
|
03-08 |
"Particle Sampling and Element Analysis from Semiconductor …
|
Ahn, Kang-Ho |
International Symposium on Cleanroom Technology and Contamination Control, |
593 |
|
03-08 |
"Theoretical and Experimental Study of the Effect of Carrier…
|
Ahn, Kang-Ho |
American Association for Aerosol Research '88 Annual Meeting, |
552 |
|
03-08 |
"Mass Transfer and Droplet Growth Processed in a Continuous…
|
Ahn, Kang-Ho |
American Association for Aerosol Research ' 87 Annual Meeting, |
584 |
|
03-08 |
"Aerosol Deposition on Semiconductor Wafers,"
|
Liu, B.Y.H. |
American Association for Aerosol Research ' 87 Annual Meeting, |
563 |
|
03-08 |
"Deposition of Charged and Uncharged Aerosol Particles on S…
|
Liu, B.Y.H. |
33rd Annual Technical Meeting, Institute of Environmental Sci., San Jose, |
694 |
